CVD Reactors
As with films, there are a lot of ways to build a reactor. In this survey will cover a few of the more common varieties.
Introduction
Tube Reactors
Showerhead Reactors
High Density Plasma Reactor
- HDP Deposition Overview
- HDP Reactor Design Issues
- Transport in HDP Reactors
- Wafer Chucks for HDP
- HDP Conclusions
Linear Injector Atmospheric Pressure Reactor
Special topic: Vapor delivery
- Bubbler Overview
- How much goes out?
- Bubbler Problems
- Direct Liquid Injection
- Vapor Concentration Monitoring
Return to Tutorial Table of Contents
Book version of the CVD Tutorial