Fundamentals of Chemical Vapor Deposition: Transport in Gaseous Media
Mass Transport
- Introduction to Transport
- Convection and Diffusion
- Diffusion: Physics and Math
- Diffusion Length
- Convection and Reynolds Number
- Plug Flow, Plug Reactor Model
- Poiseuille and Couette Flow
- Boundary Layer Flows
- Pressure and Knudsen Number
Heat Transport
- Introduction to Heat Transport
- Heat Transfer Mechanisms
- Heat Conduction and Diffusion
- Heat Conduction and Plug Flow
- Natural Convection
- Radiative Heat Transport
- Temperature Measurement
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Book version of the CVD Tutorial