CVD Films
There are innumerable films and precursors for CVD. In this survey, we’ll cover a few films that are important in semiconductor manufacturing and related fields.
Silicon Dioxide and Doped Glasses
- Film Properties and Applications
- Silane/Oxygen Thermal CVD
- TEOS/Oxygen Thermal CVD
- TEOS/Ozone Thermal CVD
- Silane/N2O PECVD
- TEOS/O2 PECVD
- High-Density Plasma CVD
Silicon Nitride
Low-K and High-K Dielectrics
Metals
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Book version of the CVD Tutorial